Adept Technology Announces New Wafer Handling Robots for Semiconductor Automation Industry

Adept Technology Inc. (San Jose, CA), a leading supplier of factory automation products, announced the AdeptVicron robot series designed for semiconductor wafer handling applications.

The new AdeptVicron series consists of four models that will accommodate different customer requirements. The AdeptVicron 200S (single arm) and 200D (dual arm) are designed to handle up to 200mm wafers. The AdeptVicron 300S (single arm) and 300D (dual arm) models handle up to 300mm wafers.

"The increasing demand for high performance automation in the semiconductor industry is driving the need for more complete wafer handling systems to simplify and streamline the entire process," says Joe Campbell, VP of marketing for Adept Technology. "With the introduction of the AdeptVicron series and the broadening of our factory automation offerings, we are able to offer a more complete wafer handling package to those customers looking to optimize their fab processes."

Adept Technology has been providing industrial automation expertise since 1983 and has shipped more than 15,000 robot systems and 5,000 OEM motion controllers to manufacturers of industrial robots and servo mechanisms. They have been involved in semiconductor automation since the mid ‘80s and have installed more than 1600 systems in both the front and back end of the semiconductor processing industry. Adept also recently announced their intent to purchase BYE/OASIS, a semiconductor minienvironment manufacturer. Adept's experience and new robot series coupled with the resources acquired from the BYE/OASIS purchase will give semiconductor customers looking for seamless system implementation a source for total automated semiconductor wafer handling solutions.

The AdeptVicron models are atmospheric three-axis (single arm) and four-axis (dual arm) robots and feature absolute encoders. The units are clean room Class 1 robots specifically designed for handling 200mm and 300mm wafers. The new robots utilize highly reliable maintenance free AC servo motors, are easy to operate using dedicated command sequences and are SECS/GEM compatible. The robots also feature vacuum-chucking at the wafer center, which makes the wafer handling secure and reliable, and minimal particle generation, which ensures a particle free wafer environment.

The AdeptVicron series will be demonstrated at SEMICON West ‘99 in July in San Francisco. List pricing starts at $28,500.